Your Position: Home > Slurries & Compounds > CMP Polishing Liquids > CMP Slurry for Semiconductor Wafer Planarization
CMP slurry
CMP slurry
CMP slurry
CMP slurry

CMP Slurry for Semiconductor Wafer Planarization

CMP Slurry | Chemical Mechanical Polishing Slurry

CMP Slurry is formulated with high-purity colloidal silica(SiO2) abrasive and is designed for semiconductor wafer planarization applications.
Abrasive Type: Colloidal Silica (SiO₂)
Compatible with CMP Systems and Pads Suitable for use with various polishing pads and CMP equipment used in semiconductor manufacturing.
Available Particle Sizes: .0.01-0.1μm
Stable colloidal silica dispersion
Reduced particle agglomeration
Support improved wafer uniformity
Suitable for oxide, silicon wafer and SiC polishing applications
Customized formulations available
Packaging: 250 ml, 500 m,1 L, 5 L, 20 L
Share With:

Colloidal Silica-Based Chemical Mechanical Polishing Slurry for Advanced Semiconductor Applications

1
Stable Colloidal Silica Dispersion: Uniform particle distribution contributes to stable polishing performance and helps reduce particle agglomeration during processing.
2
Reduced Dishing and Erosion:Advanced semiconductor devices require increasingly stringent topography control. Optimized slurry formulations help minimize dishing and erosion and contribute to improved planarization performance.
3
Lower Post-CMP Particle Defects:Particle residues remaining after polishing may affect device yield and reliability. Stable colloidal silica systems help reduce particle agglomeration and contribute to easier post-CMP cleaning.
4
Customized Formulations Available:Particle size distribution, solid content, pH value and packaging specifications can be customized according to different process requirements.
5
CMP Slurry Supplier and Manufacturer:As a professional CMP slurry supplier and manufacturer, we provide customized colloidal silica polishing slurry solutions for semiconductor wafer planarization and advanced material polishing applications.
6
Easy Post-Polishing Cleaning: Stable slurry systems help reduce residue adhesion on wafer surfaces, improving cleaning efficiency after CMP processing.
7
Flexible Dilution Capability: The slurry can be adjusted with deionized water depending on process requirements, providing flexibility for different polishing conditions.
CMP slurry

Applications of Colloidal Silica CMP Slurry

Oxide Layer Planarization

Used for dielectric layer polishing in integrated circuit manufacturing processes.

Silicon Wafer Polishing

Supports silicon wafer surface finishing with controlled roughness and improved uniformity.

SiC Wafer Polishing

Applied in silicon carbide wafer processing where defect control and surface integrity are important.

Advanced Packaging Applications

Used in packaging processes requiring high planarity and process stability.

Semiconductor Materials

Suitable for:

  • Silicon wafers
  • Silicon carbide wafers (SiC)
  • Oxide layers
  • Compound semiconductor materials
CMP slurry

Assistance & Information Contact us

Committed to providing you with quality answers, we invite you to send us a message with your contact details so that our staff can answer you as soon as possible.
morelap@moresuperhard.com
+86 17324838957
+86 17324838957

    INQUIRY NOW


    Contact us for a quote

    X